%0 Journal Article
%T IN SITU MEASUREMENT OF ELECTRIC CONDUCTIVITY OF ULTRA THIN Al FILM<br>超薄铝膜电导特性的原位测量研究
%A TANG Zhaolin
%A HUANG Rongfang
%A WEN Lishi
%A <br>唐兆麟
%A 黄荣芳
%A 闻立时
%J 金属学报
%D 1996
%I 
%X The electric conductivity of sputtered ultrathin Al films as a function of thickness has been measured in situ during vacuum deposition process. At different stages of growth, the films have the different electric conductivity characteristics. Therotical analysis showed that surface scattering and grain boundary scattering played a main role in size effect of resistivity.
%K ultrathin film
%K electric conductivity
%K size effect<br>超薄膜
%K 电导率
%K 尺寸效应
%K 铝膜
%K 原位测量
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=AB188D3B70B071C57EB64E395D864ECE&jid=B061E1135F1CBDEE96CD96C109FEAD65&aid=77B6D7D3D223B30B1F451E43B16C20FB&yid=8A15F8B0AA0E5323&vid=9971A5E270697F23&iid=38B194292C032A66&sid=51C74DF6A16DA45B&eid=7737D2F848706113&journal_id=0412-1961&journal_name=金属学报&referenced_num=3&reference_num=3