COMPUTER SIMULATION ON TEXTURE EVOLUTION OF POLYCRYSTALLINE THIN FILMS DURING GRAIN GROWTH
多晶沉积薄膜生长过程中织构演变的模拟研究

The concept of texture configuration entropy is introduced into the computer simulation on texture evolution of polycrystalline films. The grain orientation distribution in thin films is quantitatively determined by a new simple model. As an example, inverse pole figures of polycrystalline aluminum thin films are simulated by considering the change of texture configuration entropy and another orientation dependent driving forces during grain growth, such as surface energy and strain energy. The physical mechanisms affecting the texture evolution of polycrystalline thin films are discussed.