%0 Journal Article
%T COMPUTER SIMULATION ON TEXTURE EVOLUTION OF POLYCRYSTALLINE THIN FILMS DURING GRAIN GROWTH<br>多晶沉积薄膜生长过程中织构演变的模拟研究
%A WANG Yandong
%A LIU Yandong
%A XU Jiachen
%A LIANG Zhide
%A <br>王沿东
%A 刘沿东
%A 徐家桢
%A 梁志德
%J 金属学报
%D 1998
%I 
%X The concept of texture configuration entropy is introduced into the computer simulation on texture evolution of polycrystalline films. The grain orientation distribution in thin films is quantitatively determined by a new simple model. As an example, inverse pole figures of polycrystalline aluminum thin films are simulated by considering the change of texture configuration entropy and another orientation dependent driving forces during grain growth, such as surface energy and strain energy. The physical mechanisms affecting the texture evolution of polycrystalline thin films are discussed.
%K polycrystalline thin film
%K texture evolution
%K configuxation entropy<br>多晶薄膜
%K 织构演变
%K 组态熵
%K 薄膜生长
%K 薄膜沉积
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=AB188D3B70B071C57EB64E395D864ECE&jid=B061E1135F1CBDEE96CD96C109FEAD65&aid=5175C9D46105FE5D6AECC44BB6D33F35&yid=8CAA3A429E3EA654&vid=339D79302DF62549&iid=38B194292C032A66&sid=C2F76551C0111538&eid=3C6F5C97A07587AE&journal_id=0412-1961&journal_name=金属学报&referenced_num=2&reference_num=8