A NEW METHOD ON EVALUATING THE YIELD STRENGTH OF METAL FILMS USING DEPTH-SENSING INDENTATION INSTRUMENT
测定金属薄膜屈服强度的纳米压入法研究

The fiaite element method of elastoplastic large strain was employed to study the indentation erperhoent of thin metal films on silicon substrate combinatioll by a raid spheriod indenter. The relationship between the hardening index of the film and the charactedstic value of load--displaCement curve, and that among the yield strength, hardening indeX, Youness modulus of the film and the m applied load have been established. Co-cub theSe twoforacteristic s and the maxinunn load given by nanoboedtstion test, the hardening index and po strength of the metal oh can be obtained.