%0 Journal Article
%T A NEW METHOD ON EVALUATING THE YIELD STRENGTH OF METAL FILMS USING DEPTH-SENSING INDENTATION INSTRUMENT<br>测定金属薄膜屈服强度的纳米压入法研究
%A MA Dejun
%A XU Kewei
%A HE Jiawen
%A <br>马德军
%A 徐可为
%A 何家文
%J 金属学报
%D 1998
%I 
%X The fiaite element method of elastoplastic large strain was employed to study the indentation erperhoent of thin metal films on silicon substrate combinatioll by a raid spheriod indenter. The relationship between the hardening index of the film and the charactedstic value of load--displaCement curve, and that among the yield strength, hardening indeX, Youness modulus of the film and the m applied load have been established. Co-cub theSe twoforacteristic s and the maxinunn load given by nanoboedtstion test, the hardening index and po strength of the metal oh can be obtained.
%K Metal film
%K yield strength
%K nanoindeatation method
%K finite element method<br>金属薄膜
%K 屈服强度
%K 纳米压入法
%K 有限元
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=AB188D3B70B071C57EB64E395D864ECE&jid=B061E1135F1CBDEE96CD96C109FEAD65&aid=ECDC9ECCF881A3E310F4C01D9674BCCD&yid=8CAA3A429E3EA654&vid=339D79302DF62549&iid=B31275AF3241DB2D&sid=8DDBA6455F2E3ECF&eid=1C3BB0F444F5E427&journal_id=0412-1961&journal_name=金属学报&referenced_num=6&reference_num=1