EFFECTS OF TEMPERATURE RISE IN METAL DURING HIGH CURRENTION-IMPLANTATION
金属中强束流离子注入的温升效应

From solving the nonlinear equation of thermal conduction by using the finitedifference method,the effects of temperature rise in metals during high currention-implantation have been calculated. Curves of temperature rises, curves of profile temper-ature distributions, and dependences of sample surface temperature upon ion energies,doserates, target temperatures, and sample thicknesses are obtained. The processes of temperaturerise in pulsed and scanning ion-implantations are computed as well, and the temperaturefluctuations in them are discussed also.