%0 Journal Article
%T EFFECTS OF TEMPERATURE RISE IN METAL DURING HIGH CURRENTION-IMPLANTATION
金属中强束流离子注入的温升效应
%A TIAN Renhe
%A GU Yongti
%A LU Wuxing
%A LIN Wenlian
%A ZHANG Tonghe
%A ZHANG Huixing Institute of Low Energy Nuclear Plysics
%A Beijing Normal University associate professor
%A
田人和
%A 顾永俶
%A 卢武星
%A 林文廉
%A 张通和
%A 张荟星
%J 金属学报
%D 1993
%I
%X From solving the nonlinear equation of thermal conduction by using the finitedifference method,the effects of temperature rise in metals during high currention-implantation have been calculated. Curves of temperature rises, curves of profile temper-ature distributions, and dependences of sample surface temperature upon ion energies,doserates, target temperatures, and sample thicknesses are obtained. The processes of temperaturerise in pulsed and scanning ion-implantations are computed as well, and the temperaturefluctuations in them are discussed also.
%K steel TBA
%K ion-implantation
%K non-linear thermal conduction
%K numerical calculation
离子注入
%K 数值计算
%K 碳素钢
%K 工具钢
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=AB188D3B70B071C57EB64E395D864ECE&jid=B061E1135F1CBDEE96CD96C109FEAD65&aid=CFD8DC9DF4FC946A1B62E33E3943D340&yid=D418FDC97F7C2EBA&vid=771469D9D58C34FF&iid=38B194292C032A66&sid=869807E2D7BED9EC&eid=6700D0D256586E73&journal_id=0412-1961&journal_name=金属学报&referenced_num=0&reference_num=2