KINETICS OF PREPARATION OF ULTRAFINE TiN POWDER BY HIGH FREQUENCY PLASMA
高频等离子法制取超细氮化钛反应动力学研究

The reaction kinetics model for the synthesis of ultrafine TiN pow-der from vapour phase system TiCl_4-NH_3-H_2-N_2 in the high frequency plasma reac-tor was proposed as follows: (-r_A)=-1/v(dn_(TiCl_4)/dt)=0.852e~(-63.2/RT)P_(TiCl_4)The majority of factors influenced upon the reaction be were analysed, so as toprovide the theoretical basis for improving quality of TiN powder and for opti-mizing the design of plasma reactor.