%0 Journal Article %T KINETICS OF PREPARATION OF ULTRAFINE TiN POWDER BY HIGH FREQUENCY PLASMA
高频等离子法制取超细氮化钛反应动力学研究 %A ZHU Lianxi %A ZOU Siwei Chengdu University of Science %A Technology %A
朱联锡 %A 邹四维 %J 金属学报 %D 1990 %I %X The reaction kinetics model for the synthesis of ultrafine TiN pow-der from vapour phase system TiCl_4-NH_3-H_2-N_2 in the high frequency plasma reac-tor was proposed as follows: (-r_A)=-1/v(dn_(TiCl_4)/dt)=0.852e~(-63.2/RT)P_(TiCl_4)The majority of factors influenced upon the reaction be were analysed, so as toprovide the theoretical basis for improving quality of TiN powder and for opti-mizing the design of plasma reactor. %K TiN %K plasma %K kinetics
等离子法 %K 氮化钛 %K 反应动力学 %K 粉末 %U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=AB188D3B70B071C57EB64E395D864ECE&jid=B061E1135F1CBDEE96CD96C109FEAD65&aid=E165FD31194E351CF3B509F67A817000&yid=8D39DA2CB9F38FD0&vid=96C778EE049EE47D&iid=CA4FD0336C81A37A&sid=5E25104E99903E8A&eid=B0EBA60720995721&journal_id=0412-1961&journal_name=金属学报&referenced_num=0&reference_num=1