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红外 2012
Advances in Study of Arsenic Doped HgCdTe
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Abstract:
Arsenic doped HgCdTe is the key material in the development of infrared devices including high performance infrared detectors, infrared focal plane arrays and p-on-n heterojunctions. In this work, references about arsenic doped HgCdTe are summarized. The activation of As is related to the annealing condition and the dopant concentrations. For doping concentrations in the 1016-1018cm-3 range, a two-step annealing produces activation of As of the frontside HgCdTe. The VHg concentration is high relative to the backside HgCdTe .There exist AsTe and AsHg in the space region close to the substrate.