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红外与毫米波学报 2001
CHARACTERIZATION OF UNCOOLED VO2-BASED THIN FILMS BOLOMETER
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Abstract:
An uncooled bolometer based on VO2 thin films deposited by reactive ion-beam sputtering was fabricated. The noise and responsivity for the spectral range 8-12μm were measured at 296K. At the chopper frequency of 30Hz, the device having a detectivity D* of 1.89×108cmHz1/2W-1and a thermal time constant of 0.011s was realized.
