%0 Journal Article
%T CHARACTERIZATION OF UNCOOLED VO2-BASED THIN FILMS BOLOMETER<br>基于VO2薄膜非致冷红外探测器性能研究
%A CHEN Chang-Hong
%A <br>陈长虹
%A 易新建
%A 张静　熊笔峰
%J 红外与毫米波学报
%D 2001
%I Science Press
%X An uncooled bolometer based on VO2 thin films deposited by reactive ion-beam sputtering was fabricated. The noise and responsivity for the spectral range 8-12μm were measured at 296K. At the chopper frequency of 30Hz, the device having a detectivity D* of 1.89×108cmHz1/2W-1and a thermal time constant of 0.011s was realized.
%K bolometer
%K infrared
%K vanadium dioxide
%K detectivity
%K responsivity<br>测辐射热探测器
%K 探测率
%K 黑体响应率
%K 噪声电压
%K VO2薄膜非致冷红外探测器
%K 微电子工艺
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=D3B4F771D1A06062008B4D0A2EF05996&aid=4326ABF7B63C56D4&yid=14E7EF987E4155E6&vid=A04140E723CB732E&iid=0B39A22176CE99FB&sid=58F693790F887B3B&eid=09E495F616948E78&journal_id=1001-9014&journal_name=红外与毫米波学报&referenced_num=10&reference_num=5