FABRICATION OF QUANTUM DOTS BY WET ETCHING AND STUDY OF SIZE DISTRIBUTION
量子点的湿法腐蚀制备及尺寸分布研究

Fabrication of GaAs/AlGaAs quantum dots by wet etching was accomplished by visible light lithography. The uniformity of the size was determined by tiny spot photoluminescence. Theoretical calculation was done to simulate the size distribution and to compare with the experimental results, in which the thickness fluctuation of quantum well was considered.