%0 Journal Article
%T FABRICATION OF QUANTUM DOTS BY WET ETCHING AND STUDY OF SIZE DISTRIBUTION<br>量子点的湿法腐蚀制备及尺寸分布研究
%A LIU Xing
%A Quan
%A WAN Ming
%A Fang
%A CHEN Xiao
%A Shuang
%A ZHANG Bo
%A LU Wei
%A SHEN Xue
%A Chu
%A <br>刘兴权
%A 万明芳
%J 红外与毫米波学报
%D 1998
%I Science Press
%X Fabrication of GaAs/AlGaAs quantum dots by wet etching was accomplished by visible light lithography. The uniformity of the size was determined by tiny spot photoluminescence. Theoretical calculation was done to simulate the size distribution and to compare with the experimental results, in which the thickness fluctuation of quantum well was considered.
%K quantum dots
%K wet etching
%K photoluminescence spectrum<br>量子点
%K 湿法腐蚀
%K 荧光光谱
%K 砷化镓
%K 尺寸分布
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=D3B4F771D1A06062008B4D0A2EF05996&aid=479D2C9588EF960C13A153A8E7CF3A8F&yid=8CAA3A429E3EA654&vid=BCA2697F357F2001&iid=B31275AF3241DB2D&sid=238BD7580EFCC5AE&eid=B79ACB6EBBFC9730&journal_id=1001-9014&journal_name=红外与毫米波学报&referenced_num=0&reference_num=1