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OALib Journal期刊
ISSN: 2333-9721
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OPTICAL LOW COHERENCE THERMOMETRY
光学弱相干测温

Keywords: IR laser thermometry,wafer temperature measurement,noninvasive,measurement
红外激光测温
,芯片,温度测量,非侵入性

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Abstract:

The optical low coherence thermometry (OLT) was proposed for the first time based on the optical low coherence tomography and laser interferometric thermometry (LIT). The backgrounds were restrained by means of the low coherence of the optical source.The measured phase was magnified with optical methods. As a result the precision was greatly improved. This method is very effective for the measurement of thin sample with small temperature rise.

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