%0 Journal Article
%T OPTICAL LOW COHERENCE THERMOMETRY<br>光学弱相干测温
%A Zeng Shaoqun
%A Xu Haifeng
%A Liu Xiande
%A Li Zaiguang
%A <br>曾绍群
%A 徐海峰
%J 红外与毫米波学报
%D 1996
%I Science Press
%X The optical low coherence thermometry (OLT) was proposed for the first time based on the optical low coherence tomography and laser interferometric thermometry (LIT). The backgrounds were restrained by means of the low coherence of the optical source.The measured phase was magnified with optical methods. As a result the precision was greatly improved. This method is very effective for the measurement of thin sample with small temperature rise.
%K IR laser thermometry
%K wafer temperature measurement
%K noninvasive
%K measurement<br>红外激光测温
%K 芯片
%K 温度测量
%K 非侵入性
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=D3B4F771D1A06062008B4D0A2EF05996&aid=B531FBC24B2B45C5F49651916E882752&yid=8A15F8B0AA0E5323&vid=23CCDDCD68FFCC2F&iid=B31275AF3241DB2D&sid=B7ACE2F11789CAE0&eid=4BEA9A781F286FC6&journal_id=1001-9014&journal_name=红外与毫米波学报&referenced_num=1&reference_num=3