STUDY ON THE TECHNOLOGY OF PREPARING MICRO-INFRARED FILTER ARRAY BY MASKING AND LIFTING-OFF METHOD
用掩模分离法制备微型红外滤光片列阵的工艺研究

The masking and lifting-off method to combine the technology of manufacturing semiconductor devices with the PVD method to prepare the micro-infrared filter is introduced. Also the method of integrating the filters is introduced, The results of the research work are reported.