%0 Journal Article
%T STUDY ON THE TECHNOLOGY OF PREPARING MICRO-INFRARED FILTER ARRAY BY MASKING AND LIFTING-OFF METHOD<br>用掩模分离法制备微型红外滤光片列阵的工艺研究
%A Cheng Shiping
%A Zhang Fengshan
%A Yan Yixun
%A <br>程实平
%A 张凤山
%J 红外与毫米波学报
%D 1994
%I Science Press
%X The masking and lifting-off method to combine the technology of manufacturing semiconductor devices with the PVD method to prepare the micro-infrared filter is introduced. Also the method of integrating the filters is introduced, The results of the research work are reported.
%K mask
%K micro-filter
%K array<br>掩模
%K 微型滤光片
%K 列阵
%K 滤光片
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=D3B4F771D1A06062008B4D0A2EF05996&aid=A1AB8FADDB166E8CF4595A6B4EF79615&yid=3EBE383EEA0A6494&vid=FC0714F8D2EB605D&iid=0B39A22176CE99FB&sid=91C9056D8E8856E0&eid=4BB057F167CF3A60&journal_id=1001-9014&journal_name=红外与毫米波学报&referenced_num=5&reference_num=2