STUDY ON MICROPEN DIRECT-WRITE DEPOSITION OF POLYIMIDE PATTERNS
微笔直写成型聚酰亚胺图形工艺研究

Compared to the traditional lithographic-based techniques for fabricating polyimide patterns,micropen direct-write deposition technique has many advantages such as simple,low-cost,maskless,flexible,etc.The poly-(amic acid)(PAA)solution was synthesized based on the PMDA and ODA in DMAc solvent by the low temperature solution co-polymerization method,and viscosity of the PMDA-ODA PAA solution was adjusted to make it suitable for the micropen direct-write depositing process.Polyimide patterns are fabricated by...