%0 Journal Article
%T STUDY ON MICROPEN DIRECT-WRITE DEPOSITION OF POLYIMIDE PATTERNS<br>微笔直写成型聚酰亚胺图形工艺研究
%A CAO Yu
%A WANG Xiaoye
%A ZHOU Liangwen
%A JIN Xi
%A ZENG Xiaoyan
%A <br>曹宇
%A 王小叶
%A 周良文
%A 金曦
%A 曾晓雁
%J 高分子学报
%D 2009
%I 
%X Compared to the traditional lithographic-based techniques for fabricating polyimide patterns,micropen direct-write deposition technique has many advantages such as simple,low-cost,maskless,flexible,etc.The poly-(amic acid)(PAA)solution was synthesized based on the PMDA and ODA in DMAc solvent by the low temperature solution co-polymerization method,and viscosity of the PMDA-ODA PAA solution was adjusted to make it suitable for the micropen direct-write depositing process.Polyimide patterns are fabricated by...
%K Micropen
%K Direct-write deposition
%K PAA
%K Polyimide
%K MEMS<br>微笔
%K 直写成型
%K 聚酰胺酸
%K 聚酰亚胺
%K 微机电系统
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=6579068328FE643F&jid=15971983683C7643EE80F1CE621DEB60&aid=C59F3DFCF3CCDD6C64CF5D73BBA9B361&yid=DE12191FBD62783C&iid=94C357A881DFC066&sid=F176272DD933A0BB&eid=4A2356A1257A12EB&journal_id=1000-3304&journal_name=高分子学报&referenced_num=0&reference_num=13