|
|
过程工程学报 2002
Research and Application of Synthesis of Nanopowders by Microwave Plasma-enhanced Chemical Vapor Deposition Method
|
Abstract:
The principle and some characteristics of MPECVD technology were reviewed. The superiorities of nanopowders synthesis by MPECVD over other methods were analyzed. Some recent development of synthesis of nanopowders by MPECVD in China and other countries were reviewed.
