%0 Journal Article
%T Research and Application of Synthesis of Nanopowders by Microwave Plasma-enhanced Chemical Vapor Deposition Method<br>微波等离子体化学合成纳米粉体材料研究与应用
%A HUANG Sheng-qiao
%A MA Bing
%A <br>黄生乔，马兵
%J 过程工程学报
%D 2002
%I 
%X The principle and some characteristics of MPECVD technology were reviewed. The superiorities of nanopowders synthesis by MPECVD over other methods were analyzed. Some recent development of synthesis of nanopowders by MPECVD in China and other countries were reviewed.
%K microwave plasma
%K chemical vapor deposition
%K nanopowders<br>微波等离子体
%K 化学气相沉积
%K 纳米材料
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=3FCF8B1A330466D5&jid=B9EE12934D19905403D996AE65CEEEED&aid=6CD7F0B82A6C77C9&yid=C3ACC247184A22C1&vid=0B39A22176CE99FB&iid=B31275AF3241DB2D&sid=2497388423811B81&eid=1FA4E9C3E6E88FC8&journal_id=1009-606X&journal_name=过程工程学报&referenced_num=7&reference_num=28