Electron Microscope Speckle Photography Technique
电子显微镜散斑照相技术

A novel artificial sub-micron or nanometer speckle fabricating technique was proposed by taking advantage of sub-micron or nanometer particles.In the technique,sub-micron or nanometer particles were adhered to an object surface by using ultrasonic dispersing technique.The particles on the object surface can be regarded as sub-micron or nanometer speckle by using a Scanning Electronic Microscope (SEM) at a special magnification.And,an Electron Microscope Speckle Photography (EMSP) method was developed to measure in-plane submicron or nanometer deformation of the object coated with the artificial sub-micron or nanometer speckles.The principle of artificial sub-micron or nanometer speckle fabricating technique and the EMSP method were discussed in detail.The experimental results verified that the artificial sub-micron or nanometer speckle fabricating technique and EMSP method is feasible.