Reflectance of Ir Layer in Vacuum Ultraviolet Wavelength Region Deposited by Ion Beam Sputtering
离子束溅射沉积Ir膜真空紫外反射特性研究

Based on the theoretical model of single metal layer on Absorbing substrate,the thickness optimum calculation was performed for Ir layer on Bk7,quartz glass and Si substrate in the vacuum ultravialet(VUV) wavelength region.Single layer Ir films of different thicknesses were fabricated on those substrates by ion beam sputtering technique(IBS).The influence of substrate,layer thickness,ion beam energy and post-annealing on the reflectance were investigated,and nearly 30% normal incident reflectance at 120 nm ...