Influence of Deposited Pressure on Refractive Index and Packing Density of ZrO2 Coatings by Electron Beam Evaporation
工作气压对电子束沉积ZrO2薄膜折射率和聚集密度的影响

ZrO-2 coatings were prepared by electron beam evaporation at different deposition pressure,while deposition rate was monitored and demonstrated by quartz crystal oscillation.Used the new spectroscopic ellipsometer and spectrophotometer to test about the ZrO-2 deposited spectral character and measure the film refractive index.Calculated the packing density of thin-film according to wavelength deviation dispersion theory before and after the thin-film suck tide. It was found that the refractive index and packing density were increasing as the working pressure was decreasing.