%0 Journal Article
%T Influence of Deposited Pressure on Refractive Index and Packing Density of ZrO2 Coatings by Electron Beam Evaporation<br>工作气压对电子束沉积ZrO2薄膜折射率和聚集密度的影响
%A The Laser Research Institute of Qufu Normal University
%A Shandong
%A <br>郝殿中
%A 吴福全
%A 马丽丽
%A 闫斌
%A 张旭
%J 光子学报
%D 2006
%I 
%X ZrO-2 coatings were prepared by electron beam evaporation at different deposition pressure,while deposition rate was monitored and demonstrated by quartz crystal oscillation.Used the new spectroscopic ellipsometer and spectrophotometer to test about the ZrO-2 deposited spectral character and measure the film refractive index.Calculated the packing density of thin-film according to wavelength deviation dispersion theory before and after the thin-film suck tide. It was found that the refractive index and packing density were increasing as the working pressure was decreasing.
%K Thin film
%K ZrO_2 coatings
%K Refractive index
%K Packing density
%K Electron beam evaporation<br>薄膜
%K ZrO_2薄膜
%K 折射率
%K 聚集密度
%K 电子束蒸发
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=9F6139E34DAA109F9C104697BF49FC39&aid=493BF20684F36AE3&yid=37904DC365DD7266&vid=6209D9E8050195F5&iid=0B39A22176CE99FB&sid=A1266CF37D675CF1&eid=0DEB7A8A66C33AAD&journal_id=1004-4213&journal_name=光子学报&referenced_num=5&reference_num=13