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光子学报  2009 

Micro-concave-surface Fabricated on a Photosensitive Glass by Femtosecond Laser
飞秒激光在光敏玻璃上制作微凹面

Keywords: Femtosecond laser,Micro-concave-surface,Micromachining,FOTURAN glass,Photosensitive glass
飞秒激光
,微凹面,微细加工,FOTURAN玻璃,光敏玻璃

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Abstract:

Micro-concave-surfaces were fabricated on the surface of a photosensitive glass(FOTURAN) by focused irradiation of femtosecond laser(with 775 nm-wavelength and 150 fs-pulse duration),heat treatment and wet chemical etching in 8% ultrasonic solution of hydrofluoric acid(HF) for 50 minutes at room temperature.The morphologies of the micro-concave-surfaces were analyzed by atomic force microscope(AFM) and scanning electron microscope(SEM).The analysis indicates that the micro-concave-surfaces have smooth wall,...

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