%0 Journal Article
%T Micro-concave-surface Fabricated on a Photosensitive Glass by Femtosecond Laser<br>飞秒激光在光敏玻璃上制作微凹面
%A WU Yin-zhong
%A WANG Qing-yue
%A JIA Wei
%A HU Ming-lie
%A CHAI Lu
%A <br>巫殷忠
%A 王清月
%A 贾威
%A 胡明列
%A 柴路
%J 光子学报
%D 2009
%I 
%X Micro-concave-surfaces were fabricated on the surface of a photosensitive glass(FOTURAN) by focused irradiation of femtosecond laser(with 775 nm-wavelength and 150 fs-pulse duration),heat treatment and wet chemical etching in 8% ultrasonic solution of hydrofluoric acid(HF) for 50 minutes at room temperature.The morphologies of the micro-concave-surfaces were analyzed by atomic force microscope(AFM) and scanning electron microscope(SEM).The analysis indicates that the micro-concave-surfaces have smooth wall,...
%K Femtosecond laser
%K Micro-concave-surface
%K Micromachining
%K FOTURAN glass
%K Photosensitive glass<br>飞秒激光
%K 微凹面
%K 微细加工
%K FOTURAN玻璃
%K 光敏玻璃
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=9F6139E34DAA109F9C104697BF49FC39&aid=B2A4EF4A88EEFB65C9CC3F6EC43465AA&yid=DE12191FBD62783C&vid=16D8618C6164A3ED&iid=DF92D298D3FF1E6E&sid=29BA6FD8D06FC06A&eid=D5BC5BD8C68CDE3A&journal_id=1004-4213&journal_name=光子学报&referenced_num=0&reference_num=13