Protection of Er-doped Phosphate Glass Surface in Ion-exchange Processing
掺铒磷酸盐玻璃离子交换波导表面保护的研究

Surface corrosion of Er-doped phosphate glass during ion-exchange processing for optical waveguide fabrication is studied, the corrosion mechanism is analyzed, and a protection method by using K9 glass coating is proposed and demonstrated. The surface morphology is observed and analyzed by means of optical microscope and atomic force microscope. The optical characteristics of planar waveguide are measured. Experimental results show that the K9 glass film could not only protect the Er-doped phosphate glass surface but also give no influence on the waveguide fabrication.