%0 Journal Article
%T Protection of Er-doped Phosphate Glass Surface in Ion-exchange Processing<br>掺铒磷酸盐玻璃离子交换波导表面保护的研究
%A HAN Xiu-you
%A CHU Feng-hong
%A CAI Hai-wen
%A FANG Zu-jie
%A ZHAO Ming-shan
%A <br>韩秀友
%A 初凤红
%A 蔡海文
%A 方祖捷
%A 赵明山
%J 光子学报
%D 2008
%I 
%X Surface corrosion of Er-doped phosphate glass during ion-exchange processing for optical waveguide fabrication is studied, the corrosion mechanism is analyzed, and a protection method by using K9 glass coating is proposed and demonstrated. The surface morphology is observed and analyzed by means of optical microscope and atomic force microscope. The optical characteristics of planar waveguide are measured. Experimental results show that the K9 glass film could not only protect the Er-doped phosphate glass surface but also give no influence on the waveguide fabrication.
%K Er-doped phosphate glass
%K Ion exchange
%K Surface corrosion
%K K9 glass film<br>掺铒磷酸盐玻璃
%K 离子交换
%K 表面侵蚀
%K K9玻璃薄膜
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=9F6139E34DAA109F9C104697BF49FC39&aid=2F7C0E754E64A5A7B4AC0861DE7B5ADF&yid=67289AFF6305E306&vid=42425781F0B1C26E&iid=0B39A22176CE99FB&sid=9CA95D22FC1D537C&eid=6A73B36E85DB0CE9&journal_id=1004-4213&journal_name=光子学报&referenced_num=0&reference_num=15