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光子学报 2008
Manufacture of Hexagon Aperture Plane Micro-lens Array and Its Basic Characteristics
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Abstract:
A method of the photo etching ionic exchange was applied to manufacture hexagon aperture planar microlens array.Small overlaps occurred in the changing area of hexagon aperture planar microlens array,and the fill-factor is more than 95%.Moreover,it is found that the image discrepancy is small with nice imaging quality.The sample optical qualities such as refractive index distribution,intercept,and number aperture were carried on in a more accurate survey.The development of lens array laid the foundation for the production of high-quality high fill-factor lens array and the optical system of simulated biological compound eye.