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光子学报  2008 

Manufacture of Hexagon Aperture Plane Micro-lens Array and Its Basic Characteristics
六角形孔径平面微透镜阵列的制作及基本特性研究

Keywords: Planar microlens,Hexagon aperture,Photolithographic-ion exchanging,Fill-factor
平面微透镜
,六角形孔径,光刻离子交换,填充系数

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Abstract:

A method of the photo etching ionic exchange was applied to manufacture hexagon aperture planar microlens array.Small overlaps occurred in the changing area of hexagon aperture planar microlens array,and the fill-factor is more than 95%.Moreover,it is found that the image discrepancy is small with nice imaging quality.The sample optical qualities such as refractive index distribution,intercept,and number aperture were carried on in a more accurate survey.The development of lens array laid the foundation for the production of high-quality high fill-factor lens array and the optical system of simulated biological compound eye.

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