%0 Journal Article
%T Manufacture of Hexagon Aperture Plane Micro-lens Array and Its Basic Characteristics<br>六角形孔径平面微透镜阵列的制作及基本特性研究
%A ZHANG Yu
%A LIU De-sen
%A <br>张玉
%A 刘德森
%J 光子学报
%D 2008
%I 
%X A method of the photo etching ionic exchange was applied to manufacture hexagon aperture planar microlens array.Small overlaps occurred in the changing area of hexagon aperture planar microlens array,and the fill-factor is more than 95%.Moreover,it is found that the image discrepancy is small with nice imaging quality.The sample optical qualities such as refractive index distribution,intercept,and number aperture were carried on in a more accurate survey.The development of lens array laid the foundation for the production of high-quality high fill-factor lens array and the optical system of simulated biological compound eye.
%K Planar microlens
%K Hexagon aperture
%K Photolithographic-ion exchanging
%K Fill-factor<br>平面微透镜
%K 六角形孔径
%K 光刻离子交换
%K 填充系数
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=9F6139E34DAA109F9C104697BF49FC39&aid=901937C388B08CA1C97A5D361763A668&yid=67289AFF6305E306&vid=42425781F0B1C26E&iid=5D311CA918CA9A03&sid=71706E59E547123D&eid=78FA856A8BE9CAB3&journal_id=1004-4213&journal_name=光子学报&referenced_num=3&reference_num=11