Fabricating 2-D Polymer Photonic Crystals by Soft Lithography Technology
二维光子晶体的软平板印刷技术制作研究

The characteristic and method of fabricating two-dimensional (2-D) polymer photonic crystals by soft lithography technology were analyzed.Using elastomeric polydimethysiloxane (PDMS) templates,two-dimensional polymer photonic crystals with triangular lattice structure were fabricated by soft lithography.And the high density two dimensional photonic crystal with feature sizes of 150~500 nm and aspect ratios of up to 1.25 were successfully replicated by the same method.Compared with other imprint technology,large field size and easy fabrication are two major advantages of soft lithography.Atomic Force Microscopy images show that the molded structures had high fidelity to the masters.