%0 Journal Article
%T Fabricating 2-D Polymer Photonic Crystals by Soft Lithography Technology<br>二维光子晶体的软平板印刷技术制作研究
%A ZHANG Sa-sa
%A WANG Qing-pu
%A ZHANG Xing-yu
%A LIAN Jie
%A CHANG Jun
%A LI Lan
%A CHEN Jia-qi
%A WANG Li
%A CHEN Rui-ceng
%A <br>张飒飒
%A 王青圃
%A 张行愚
%A 连洁
%A 常军
%A 李岚
%A 陈佳琦
%A 王丽
%A 陈瑞曾
%J 光子学报
%D 2009
%I 
%X The characteristic and method of fabricating two-dimensional (2-D) polymer photonic crystals by soft lithography technology were analyzed.Using elastomeric polydimethysiloxane (PDMS) templates,two-dimensional polymer photonic crystals with triangular lattice structure were fabricated by soft lithography.And the high density two dimensional photonic crystal with feature sizes of 150~500 nm and aspect ratios of up to 1.25 were successfully replicated by the same method.Compared with other imprint technology,large field size and easy fabrication are two major advantages of soft lithography.Atomic Force Microscopy images show that the molded structures had high fidelity to the masters.
%K Photonic crystal
%K Soft lithography
%K Polymer<br>光子晶体
%K 软平板印刷术
%K 聚合物
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=9F6139E34DAA109F9C104697BF49FC39&aid=766550BC72FAE1638F348636E5A8D7CB&yid=DE12191FBD62783C&vid=16D8618C6164A3ED&iid=CA4FD0336C81A37A&sid=318E4CC20AED4940&eid=6AC2A205FBB0EF23&journal_id=1004-4213&journal_name=光子学报&referenced_num=1&reference_num=26