The 2-D Grating''''s Spectrum Analysis and Application in Precise Measurement
二维光栅频谱分析及在精密测量中的应用

The Fourier method was employed to analyze the spectrum of 2-D diffraction grating,the induced results were simulated in Matlab, and the simulation was verified by the experimental photo.On the basic of these results,2-D diffraction grating used to measure 2-D displacements with high precision in nano-scale resolution, the structure using 2-D grating was given,interfere fringes were pictured,and the experimental results can meet the nano resolution measurement.