%0 Journal Article
%T The 2-D Grating''''s Spectrum Analysis and Application in Precise Measurement<br>二维光栅频谱分析及在精密测量中的应用
%A XIA Hao-jie
%A FEI Ye-tai
%A WANG Zhong-yu
%A <br>夏豪杰
%A 费业泰
%A 王中宇
%J 光子学报
%D 2007
%I 
%X The Fourier method was employed to analyze the spectrum of 2-D diffraction grating,the induced results were simulated in Matlab, and the simulation was verified by the experimental photo.On the basic of these results,2-D diffraction grating used to measure 2-D displacements with high precision in nano-scale resolution, the structure using 2-D grating was given,interfere fringes were pictured,and the experimental results can meet the nano resolution measurement.
%K measurement
%K 2-D grating
%K spectrum analysis
%K displacement<br>测量
%K 二维光栅
%K 频谱分析
%K 位移
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=9F6139E34DAA109F9C104697BF49FC39&aid=CF1E42ACE6B20646F9ADC22B192E45F6&yid=A732AF04DDA03BB3&vid=933658645952ED9F&iid=E158A972A605785F&sid=71128DCBD6E39665&eid=B3AAD7DC3C912B50&journal_id=1004-4213&journal_name=光子学报&referenced_num=0&reference_num=12