A Low Loss Planar Waveguide by Using Organic-inorganic Sol-Gel
低损耗有机无机混合溶胶凝胶波导的实验研究

An organic-inorganic hybrid sol-gel material by using Tetraethylorthosilicate(Teos) and phenyltriethoxysilane(Phtes) as precursors was synthesized, and a planar optical waveguide was fabricated by using spin-coating on silicon substrate. A rib strip waveguide was formed by inductively coupled plasma (ICP). A relation between refractive index and composition of the precursors was obtained by M-line method; the optical loss of the planar waveguide was measured to be 0.23 dB/cm at 632.8 nm wavelength.