%0 Journal Article
%T A Low Loss Planar Waveguide by Using Organic-inorganic Sol-Gel<br>低损耗有机无机混合溶胶凝胶波导的实验研究
%A Pang Fufei
%A Han Xuiyou
%A Cai Haiwen
%A Fang Zujie
%A <br>庞拂飞
%A 韩秀友
%A 蔡海文
%A 方祖捷
%J 光子学报
%D 2006
%I 
%X An organic-inorganic hybrid sol-gel material by using Tetraethylorthosilicate(Teos) and phenyltriethoxysilane(Phtes) as precursors was synthesized, and a planar optical waveguide was fabricated by using spin-coating on silicon substrate. A rib strip waveguide was formed by inductively coupled plasma (ICP). A relation between refractive index and composition of the precursors was obtained by M-line method; the optical loss of the planar waveguide was measured to be 0.23 dB/cm at 632.8 nm wavelength.
%K Sol-gel method
%K Organic-inorganic waveguide
%K ICP<br>溶胶-凝胶法
%K 有机-无机混合波导
%K ICP
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=9F6139E34DAA109F9C104697BF49FC39&aid=38846E1E45DA4F02&yid=37904DC365DD7266&vid=6209D9E8050195F5&iid=E158A972A605785F&sid=4ECB3941871FD391&eid=D8AE57480552698F&journal_id=1004-4213&journal_name=光子学报&referenced_num=3&reference_num=11