Study on Position Sensor of Holographic Variable Line-Space Plane Gratings
全息平面变间距光栅位移传感器研究

The principal of VLS grating position sensor and the method of fabrication of VLS gratings with holographic recording were briefly described.These gratings with large slope density distribution were used in position sensors.The preliminary results obtained were quite positive.The actual measurements show that the grating sensor has position resolution of 0.05 mm,and the relative error can be controlled in 0.2% FS.