%0 Journal Article
%T Study on Position Sensor of Holographic Variable Line-Space Plane Gratings<br>全息平面变间距光栅位移传感器研究
%A LOU Jun
%A FU Shao-jun
%A LIU Zheng-kun
%A XU Xiang-dong
%A HE Shi-ping
%A LI Bing-shi
%A WU Zhong
%A <br>楼俊
%A 付绍军
%A 刘正坤
%A 徐向东
%A 何世平
%A 李秉实
%A 吴忠
%J 光子学报
%D 2007
%I 
%X The principal of VLS grating position sensor and the method of fabrication of VLS gratings with holographic recording were briefly described.These gratings with large slope density distribution were used in position sensors.The preliminary results obtained were quite positive.The actual measurements show that the grating sensor has position resolution of 0.05 mm,and the relative error can be controlled in 0.2% FS.
%K Holographic gratings
%K Variable line-space gratings
%K Position sensor<br>全息光栅
%K 变间距光栅
%K 位移传感器
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=9F6139E34DAA109F9C104697BF49FC39&aid=2408EBC64876B8E88FB07EAD0F63518E&yid=A732AF04DDA03BB3&vid=933658645952ED9F&iid=E158A972A605785F&sid=04FC77FB58A9B53A&eid=4E8E6A5CE04FD382&journal_id=1004-4213&journal_name=光子学报&referenced_num=1&reference_num=18