Fabrication of Mid-Infrared 8-Channel Micro Integrated Filter
中波红外8通道微型集成滤光片的研制

Integration is the trend of multi-channel filter in imaging spectrum system,which is called mirco filters. Adjusting the center layer of F-P filter is an effective method to fabricate multi-channel filters. Because of limitation of usual optical coating technology, so the yield of integrating all channel in single substrate is very low. A new method is developed to solve this problem, which combines multi-time ion mask etching with tradition coating technique. As an example, an 8-channel micro integrated filter is fabricated,and optical channel position control accuracy is below 1%.