%0 Journal Article
%T Fabrication of Mid-Infrared 8-Channel Micro Integrated Filter<br>中波红外8通道微型集成滤光片的研制
%A (Shanghai Institute of Technical Physics
%A Chinese Academy of Science
%A Shanghai
%A <br>林炳
%A 刘定权
%A 孔令方
%A 张凤山
%J 光子学报
%D 2005
%I 
%X Integration is the trend of multi-channel filter in imaging spectrum system,which is called mirco filters. Adjusting the center layer of F-P filter is an effective method to fabricate multi-channel filters. Because of limitation of usual optical coating technology, so the yield of integrating all channel in single substrate is very low. A new method is developed to solve this problem, which combines multi-time ion mask etching with tradition coating technique. As an example, an 8-channel micro integrated filter is fabricated,and optical channel position control accuracy is below 1%.
%K Optical films
%K Integrated filter
%K Multi channel filters
%K Micro filter<br>光学薄膜
%K 集成滤光片
%K 多通道滤光器
%K 微型滤光片
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=9F6139E34DAA109F9C104697BF49FC39&aid=7036F716A65E677E&yid=2DD7160C83D0ACED&vid=339D79302DF62549&iid=9CF7A0430CBB2DFD&sid=525C740F5A062BF4&eid=80428A5C4056DF37&journal_id=1004-4213&journal_name=光子学报&referenced_num=0&reference_num=8