Study of Integrator Rod in Step-and-scan Lithography
积分棒在步进扫描投影光刻系统中的应用

Based on geometric optics,the homogenizing principle of integrator rod was analyzed.Then the application of integrator rod in step-and-scan lithography systems was introduced.After that,the effect of NA of incident beam on the intensity distribution at blades plane was discussed and the relationship between the dimensions of integrator rod and the illumination field was obtained.The analysis above provided foundation for the design of integrator rod in step-and-scan lithography systems.