%0 Journal Article
%T Study of Integrator Rod in Step-and-scan Lithography<br>积分棒在步进扫描投影光刻系统中的应用
%A Guo Liping
%A Huang Huijie
%A Wang Xiangzhao
%A <br>郭立萍
%A 黄惠杰
%A 王向朝
%J 光子学报
%D 2006
%I 
%X Based on geometric optics,the homogenizing principle of integrator rod was analyzed.Then the application of integrator rod in step-and-scan lithography systems was introduced.After that,the effect of NA of incident beam on the intensity distribution at blades plane was discussed and the relationship between the dimensions of integrator rod and the illumination field was obtained.The analysis above provided foundation for the design of integrator rod in step-and-scan lithography systems.
%K Optical lithography
%K Illumination uniformity
%K Non-sequential component
%K Integrator rod<br>光刻
%K 照明均匀性
%K 非序列光学元件
%K 积分棒
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=9F6139E34DAA109F9C104697BF49FC39&aid=1A8798CA3B42909F&yid=37904DC365DD7266&vid=6209D9E8050195F5&iid=DF92D298D3FF1E6E&sid=90C2E72D2E105FF5&eid=80B081C203919926&journal_id=1004-4213&journal_name=光子学报&referenced_num=0&reference_num=12