|
|
光子学报 2004
Fabrication and Characterization of Sol-Gel Silica Waveguides
|
Abstract:
It is very convenient to fabricate the waveguides films using photosensitive sol-gel, which synthesized with ORMOSIL, due to the refractive index of this sol-gel is similar to that of SiO 2. The hybrid sol-gel occurred complex photochemical reactions when exposed to UV light, the unexposed regions of the film are removed through soaking the films in a special solvent. The effects of the UV exposure time and the postbake temperature on the refractive index and the structure of the films were investigated.
