%0 Journal Article
%T Fabrication and Characterization of Sol-Gel Silica Waveguides<br>溶胶-凝胶法制备光波导薄膜及性质的研究
%A ( R&
%A D Center of Optoelectronics
%A Institute of Semiconductors of Chinese Academy of Sciences
%A Beijing ( Institute of Beijing Chemical Reagent
%A Beijing ( School of Physical Science
%A Technology
%A Lanzhou University
%A Lanzhou
%A <br>姜永睿
%A 胡雄伟
%A 杨沁清
%A 王红杰
%A 杨澜
%A 郑金红
%A 谢二庆
%J 光子学报
%D 2004
%I 
%X It is very convenient to fabricate the waveguides films using photosensitive sol-gel, which synthesized with ORMOSIL, due to the refractive index of this sol-gel is similar to that of SiO 2. The hybrid sol-gel occurred complex photochemical reactions when exposed to UV light, the unexposed regions of the film are removed through soaking the films in a special solvent. The effects of the UV exposure time and the postbake temperature on the refractive index and the structure of the films were investigated.
%K Photosensitive sol-gel
%K SiO
%K 2 film
%K Refractive index
%K FT-IR spectra
%K Waveguide<br>光敏性溶胶一凝胶
%K SiO2薄膜
%K 折射率
%K 红外光谱
%K 波导
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=9F6139E34DAA109F9C104697BF49FC39&aid=EECF9D0EB92B2126&yid=D0E58B75BFD8E51C&vid=27746BCEEE58E9DC&iid=9CF7A0430CBB2DFD&sid=D932AD0F8FDA3032&eid=CF89D3C02791C82E&journal_id=1004-4213&journal_name=光子学报&referenced_num=8&reference_num=17