A Low-Noise Readout Circuit for Bulk Micro-Machined Capacitive Gyroscope
一种用于电容型体硅微陀螺的低噪声读出电路芯片

Readout circuit is a key factor determining the performance of MEMS gyroscope system, being at the forefront of the signal loop. This paper presents a low-noise readout circuit for a bulk micromachined tuning fork gyroscope. Using the chopper technique, the circuit can improve the resolution and dynamic range by canceling 1/f noise and offset of the amplifier, and mismatch between reference voltages. Theory predicting the resolution of the readout circuit is given which is based on noise charge transfer met...