%0 Journal Article
%T A Low-Noise Readout Circuit for Bulk Micro-Machined Capacitive Gyroscope
一种用于电容型体硅微陀螺的低噪声读出电路芯片
%A Yin Tao
%A Yang Hai-gang
%A Zhang Chong
%A Wu Qi-song
%A Jiao Ji-wei
%A Mi Bin-wei
%A
尹 韬
%A 杨海钢
%A 张 翀
%A 吴其松
%A 焦继伟
%A 宓斌玮
%J 电子与信息学报
%D 2010
%I
%X Readout circuit is a key factor determining the performance of MEMS gyroscope system, being at the forefront of the signal loop. This paper presents a low-noise readout circuit for a bulk micromachined tuning fork gyroscope. Using the chopper technique, the circuit can improve the resolution and dynamic range by canceling 1/f noise and offset of the amplifier, and mismatch between reference voltages. Theory predicting the resolution of the readout circuit is given which is based on noise charge transfer met...
%K Gyroscope
%K Readout circuit
%K Low noise
%K Chopper
微陀螺
%K 读出电路
%K 低噪声
%K 斩波
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=EFC0377B03BD8D0EF4BBB548AC5F739A&aid=526FB67FA1941494B058CFB7354439FA&yid=140ECF96957D60B2&vid=9971A5E270697F23&iid=CA4FD0336C81A37A&sid=38685BC770C663F2&eid=79D2EF35F60110C2&journal_id=1009-5896&journal_name=电子与信息学报&referenced_num=0&reference_num=14