Electric Field Micro-sensor with a Closed-loop Autonomous Driving Circuit
一种闭环自激式驱动的硅微机械电场传感器

A new micromechanical electric field sensor system with a closed-loop autonomous driving circuit is designed and simulated. The closed-loop autonomous driving circuit, which uses the principle of auto-gain-control, keeps the micro sensor working in the resonance state, and keeps the stable resonance amplitude. The simulation result shows, compared with the open-loop driving mode, the sensor can catch the new resonance frequency, the attenuation of libration amplitude is reduced from 30% to 0.1%, and the attenuation of the sensitivity of the sensor is reduced from 50% to 0.1%, when the resonance frequency changes 0.5%.