%0 Journal Article
%T Electric Field Micro-sensor with a Closed-loop Autonomous Driving Circuit<br>一种闭环自激式驱动的硅微机械电场传感器
%A Xiong You-ya Peng Chun-rong Xia Shan-hong
%A <br>熊幼芽
%A 彭春荣
%A 夏善红
%J 电子与信息学报
%D 2009
%I 
%X A new micromechanical electric field sensor system with a closed-loop autonomous driving circuit is designed and simulated. The closed-loop autonomous driving circuit, which uses the principle of auto-gain-control, keeps the micro sensor working in the resonance state, and keeps the stable resonance amplitude. The simulation result shows, compared with the open-loop driving mode, the sensor can catch the new resonance frequency, the attenuation of libration amplitude is reduced from 30% to 0.1%, and the attenuation of the sensitivity of the sensor is reduced from 50% to 0.1%, when the resonance frequency changes 0.5%.
%K Micromechanical electric field sensor
%K Closed-loop
%K Autonomous driving circuit<br>微型电场传感器
%K 闭环
%K 自激驱动电路
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=EFC0377B03BD8D0EF4BBB548AC5F739A&aid=9D59E4018DCB1D8F1F3CD4FF01E149F5&yid=DE12191FBD62783C&vid=4AD960B5AD2D111A&iid=708DD6B15D2464E8&sid=7566B65E140CCD73&eid=69244934A79CA4D8&journal_id=1009-5896&journal_name=电子与信息学报&referenced_num=1&reference_num=13